Imaging Spectroscopy Ellipsometer nanofilm_EP4
Instrument: Imaging Spectroscopy Ellipsometer nanofilm_EP4
Location: laboratory 132
The imaging ellipsometer EP4 operates on the principle of classical null ellipsometry and real-time ellipsometric contrast imaging. The laser beam is elliptically polarized after it passes through a linear polarizer and a quarter-wave plate. The elliptically polarized light is then reflected off the sample onto an analyser and imaged onto a CCD camera through a long working distance objective. This enables surface characterization with lateral resolution as small as 1 micron, resolving sample areas 1000 times smaller than most non-imaging ellipsometers, even if they use micro spot spectroscopic option.
Using the nanofilm_EP4 one can measure parameters like thickness, refractive index and absorption of analysing sample.
The structure of a sample can be visualized on a microscopic scale and 3D profile maps of selected areas can be recorded. Instrument can operate together with QCM-D.
- direct sample visualization with an ellipsometric contrast image with a lateral resolution as small as 1 micron
- imaging ellipsometry in the wavelength range from 350 nm to 900 nm
- SPR, solid/liquid cell, liquid/liquid cell, light guide for liquid/liquid interfaces, temperature control, electrochemistry cells
- real time ellipsometric contrast images provide a fast view of the surface, any defects or structures
- parallel measurement of multiple areas within the selected field of view
- Knife edge illumination avoids background reflection and allows measurements on thin transparent substrates
Contact: Ph.D. Lilianna Szyk-Warszyńska phone: +48 12 6395 129
Access: Aparatura dostępna pod nadzorem personelu laboratorium. Zgodnie z grafikiem.